Method for fabricating light emitting diode chip

ABSTRACT

A method for fabricating a light emitting diode chip is provided. Firstly, a semiconductor device layer is formed on a substrate. Afterwards, a current spreading layer is formed on a portion of the semiconductor device layer. Then, a current blocking layer and a passivation layer are formed on a portion of the semiconductor device layer not covered by the current spreading layer. Finally, a first electrode is formed on the current blocking layer and the current spreading layer. Moreover, a second electrode is formed on the semiconductor device layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of and claims the priority benefit ofU.S. application Ser. No. 12/398,165 filed on Mar. 4, 2009, now allowed,which claims the priority benefit of Taiwan application serial no.97151136, filed on Dec. 26, 2008. The entirety of each of theabove-mentioned patent applications is hereby incorporated by referenceherein and made a part of this specification.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of fabricating a chip, andmore particularly to a method of fabricating a light emitting diode(LED) chip.

2. Description of Related Art

FIGS. 1A through 1F schematically illustrate cross-sectional views of afabricating process of a conventional light emitting diode chip.Firstly, a first type semiconductor material layer 122, a light emittingmaterial layer 124, and a second type semiconductor material layer 126are sequentially formed on a substrate 110 to form a semiconductorstacked layer 128. Here, a method of forming the semiconductor stackedlayer 128 is, for example, a metal organic chemical vapor deposition(MOCVD) process, or other suitable epitaxial processes to form thesemiconductor stacked layer 128 as shown in FIG. 1A.

Next, the semiconductor stacked layer 128 is patterned to form asemiconductor device layer 120. The semiconductor device layer 120 asshown in FIG. 1B is formed by a conventional photolithography andetching process (PEP).

Thereafter, a current blocking layer 130 is formed on an upper surface120 a of the semiconductor device layer 120. Here, the current blockinglayer 130 as shown in FIG. 1C is formed by the conventional PEP.Specifically, the method of forming the current blocking layer 130 isforming a dielectric material layer (not shown) entirely on thesubstrate 110. Then, the dielectric material layer is patterned by thePEP to form the current blocking layer 130 as shown by FIG. 1C.

Afterwards, a current spreading layer 140 is formed on an upper surface120 a of the semiconductor device layer 120 to cover the currentblocking layer 130. The current spreading layer 140 is formed by theconventional PEP. In other words, the method of forming the currentspreading layer 140 is forming a conductive layer (not shown) entirelyon the substrate 110 to cover the semiconductor device layer 120 and thecurrent blocking layer 130. Next, the conductive layer is patterned bythe PEP to form the current spreading layer 140 as shown by FIG. 1D.

Upon completion of the foregoing steps, a plurality of electrodes 150 isformed on the current spreading layer 140 and the semiconductor devicelayer 120. The electrodes 150 are formed by the conventional PEP.Specifically, the method of forming the electrodes 150 is forming anelectrode material layer (not shown) entirely on the current spreadinglayer 140 and the semiconductor device layer 120. Next, the electrodematerial layer is patterned by the PEP to form the electrodes 150 on thecurrent spreading layer 140 and the semiconductor device layer 120, asshown by FIG. 1E.

Then, a passivation layer 160 is formed on the current spreading layer140 and the semiconductor device layer 120 not covered by the electrodes150. The passivation layer 160 is formed by the conventional PEP, forexample. Specifically, the method of forming the passivation layer 160is forming a dielectric material layer (not shown) entirely on thesubstrate 110 to cover the current spreading layer 140, the electrodes150, and the semiconductor device layer 120. Next, the electrodematerial layer is patterned by the PEP to form the passivation layer 160on the current spreading layer 140 and the semiconductor device layer120 not covered by the electrodes 150, as shown in FIG. 1F. So far, thefabricating steps of the conventional light emitting diode chip 100 aregenerally completed.

In view of the foregoing, the fabrication of the conventional lightemitting diode chip 100 requires at least five PEPs. In other words, thelight emitting diode chip 100 requires at least five masks of differentpatterns to perform the PEPs aforementioned. Since each of the masks israther costly, the fabrication cost and the fabrication time of thelight emitting diode chip 100 can not be reduced.

SUMMARY OF THE INVENTION

The present invention provides a method of fabricating a light emittingdiode chip, which has simpler fabricating steps and is compatible withcurrent processes.

The present invention provides a method of fabricating a light emittingdiode chip. Firstly, a semiconductor device layer is formed on asubstrate. Next, a current spreading layer is formed on a portion of thesemiconductor device layer. Then, a current blocking layer and apassivation layer are formed on a portion of the semiconductor devicelayer that is not covered by the current spreading layer. Afterwards, afirst electrode is formed on the current blocking layer and the currentspreading layer. Subsequently, a second electrode is formed on thesemiconductor device layer.

According to an embodiment of the present invention, the method offorming the current spreading layer includes the following steps.Firstly, a conductive layer is formed on the second type semiconductorlayer. Then, the conductive layer is patterned to form the currentspreading layer.

In one embodiment of the present invention, the current spreading layerhas an opening to expose an upper surface of the second typesemiconductor layer, and the current blocking layer contacts with theupper surface of the second type semiconductor layer through theopening.

In one embodiment of the present invention, a contact area of thecurrent blocking layer and the second type semiconductor layersubstantially equals to a bottom area of the opening.

In one embodiment of the present invention, the contact area of thecurrent blocking layer and the second type semiconductor layer issubstantially smaller than the bottom area of the opening.

In one embodiment of the present invention, a portion of the second typesemiconductor layer exposed by the opening but not covered by thecurrent blocking layer is electrically connected to the first electrode.

In one embodiment of the present invention, a method of forming thecurrent blocking layer and the passivation layer includes the followingsteps. Firstly, a dielectric layer is formed on a portion of thesemiconductor device layer that is not covered by the current spreadinglayer. Then, the dielectric layer is patterned to form the currentblocking layer and the passivation layer simultaneously.

The present invention further provides a method of fabricating a lightemitting diode chip. Firstly, a semiconductor device layer is formed ona substrate. Next, a current blocking layer and a passivation layer areformed on a portion of the semiconductor device layer. Then, a portionof the semiconductor device layer which is not covered by the currentblocking layer and the passivation layer is removed, so as to form aplurality of identification recesses on the semiconductor device layer.Afterwards, a current spreading layer is formed on the current blockinglayer and a portion of the semiconductor device layer. Subsequently, afirst electrode is formed on the current spreading layer. Lastly, asecond electrode is formed on the semiconductor device layer.

In one embodiment of the present invention, a method of forming thecurrent blocking layer and the passivation layer includes the followingsteps. Firstly, a dielectric layer is formed on a semiconductor devicelayer. Then, the dielectric layer is patterned to form the currentblocking layer and the passivation layer simultaneously.

In one embodiment of the present invention, a material of the dielectriclayer includes a silicon carbide based material.

In one embodiment of the present invention, the material of thedielectric layer includes silicon oxide, silicon nitride, or siliconoxynitride.

In one embodiment of the present invention, a method of forming theidentification recesses includes etching.

In one embodiment of the present invention, the method of forming thecurrent spreading layer includes the following steps. Firstly, aconductive layer is formed on the second type semiconductor layer andthe current blocking layer. Then, the conductive layer is patterned toform the current spreading layer.

In one embodiment of the present invention, the current spreading layerhas an opening to expose an upper surface of the current blocking layer,and the first electrode contacts with the upper surface of the currentblocking layer through the opening.

The present invention further provides a method of fabricating a lightemitting diode chip. Firstly, a semiconductor device layer is formed ona substrate. Then, a patterned functional layer with multi-layerstructure is formed simultaneously on a portion of the semiconductordevice layer. Next, a current spreading layer is formed on a portion ofthe patterned functional layer and a portion of the semiconductor devicelayer. Afterwards, a first electrode is formed on the current spreadinglayer. Subsequently, a second electrode is formed on the semiconductordevice layer.

In one embodiment of the present invention, a method of forming thesemiconductor device layer includes the following steps. Firstly, asemiconductor layer is formed on the substrate. Then, the semiconductorlayer is patterned to form the semiconductor device layer.

In one embodiment of the present invention, a method of forming thesemiconductor device layer includes the following steps. Firstly, afirst type semiconductor material layer, a light emitting materiallayer, and a second type semiconductor material layer are sequentiallyformed on the substrate. Next, the second type semiconductor materiallayer, the light emitting material layer, and the first typesemiconductor material layer are patterned to form a first typesemiconductor layer, a light emitting layer, and a second typesemiconductor layer. The light emitting layer is disposed on a portionof the first type semiconductor layer, and the second type semiconductorlayer is disposed on the light emitting layer.

In one embodiment of the present invention, the method of forming thepatterned functional layer includes following steps. Firstly, a firstdielectric layer is formed on the semiconductor device layer. Then, analignment identification layer is formed on the first dielectric layer.Next, the first dielectric layer and the alignment identification layerare patterned to form a current blocking layer and a passivation layersimultaneously.

In one embodiment of the present invention, the method of forming thepatterned functional layer includes following steps. Firstly, a firstdielectric layer is formed on the semiconductor device layer. Then, analignment identification layer is formed on the first dielectric layer.Afterwards, the first dielectric layer and the alignment identificationlayer are patterned to simultaneously form a current blocking layer, apassivation layer, and an isolating trench disposed within thepassivation layer.

In one embodiment of the present invention, the method of forming thepatterned functional layer includes following steps. Firstly, a firstdielectric layer is formed on the semiconductor device layer. Then, analignment identification layer is formed on the first dielectric layer.Next, a second dielectric layer is formed on the alignmentidentification layer. Afterwards, the first dielectric layer, thealignment identification layer, and the second dielectric layer arepatterned to form a current blocking layer and a passivation layersimultaneously.

In one embodiment of the present invention, the method of forming thepatterned functional layer includes following steps. Firstly, a firstdielectric layer is formed on the semiconductor device layer. Then, analignment identification layer is formed on the first dielectric layer.Next, a second dielectric layer is formed on the alignmentidentification layer. Afterwards, the first dielectric layer, thealignment identification layer, and the second dielectric layer arepatterned to simultaneously form a current blocking layer, a passivationlayer, and an isolating trench disposed within the passivation layer.

In one embodiment of the present invention, a material of the firstdielectric layer or the second dielectric layer includes a siliconcarbide based material.

In one embodiment of the present invention, the silicon carbide basedmaterial includes SiO_(x)C_(y): H, SiC, SiC_(x)N_(y), orSiO_(x)C_(y)N_(z).

In one embodiment of the present invention, the material of the firstdielectric layer or the second dielectric layer includes silicon oxide,silicon nitride, or silicon oxynitride.

In one embodiment of the present invention, a material of the alignmentidentification layer includes metal.

In one embodiment of the present invention, the method of forming acurrent spreading layer includes the following steps. Firstly, aconductive layer is formed on a second type semiconductor layer and acurrent blocking layer. Then, the conductive layer is patterned to formthe current spreading layer.

In one embodiment of the present invention, the current blocking layerhas an opening to expose an upper surface of the second typesemiconductor layer, and the current spreading layer contacts with theupper surface of the second type semiconductor layer through theopening.

In one embodiment of the present invention, the current blocking layerand the current spreading layer are fabricated simultaneously with thesame PEP. Hence, the steps of fabricating the light emitting diode chipcan be reduced so as to save the fabrication cost and the fabricationtime. Moreover, the present invention provides design of a patternedfunctional layer to simultaneously form the current blocking layer andthe current spreading layer. Additionally, the accuracy of alignment isimproved so as to enhance the reliability of the fabricating process.

In order to make the aforementioned and other features and advantages ofthe present invention more comprehensible, several embodimentsaccompanied with figures are described in detail below.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the invention, and are incorporated in and constitute apart of this specification. The drawings illustrate embodiments of theinvention and, together with the description, serve to explain theprinciples of the invention.

FIGS. 1A through 1F schematically illustrate cross-sectional views of afabricating process of a conventional light emitting diode chip.

FIGS. 2A through 2E schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a firstembodiment of the present invention.

FIGS. 3A to 3B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention.

FIGS. 4A through 4F schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a secondembodiment of the present invention.

FIGS. 5A to 5B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention.

FIGS. 6A through 6E schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a thirdembodiment of the present invention.

FIGS. 7A to 7C schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention.

FIGS. 8A to 8B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention.

FIGS. 9A through 9E schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a fourthembodiment of the present invention.

FIGS. 10A to 10C schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention.

FIGS. 11A to 11B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention.

FIGS. 12A through 12E schematically illustrate cross-sectional views ofa fabricating process of a light emitting diode chip according to afifth embodiment of the present invention.

DESCRIPTION OF EMBODIMENTS

The First Embodiment

FIGS. 2A through 2E schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a firstembodiment of the present invention. Firstly, a first type semiconductormaterial layer 222, a light emitting material layer 224, and a secondtype semiconductor material layer 226 are sequentially formed on asubstrate 210 to form a semiconductor layer 228, as illustrated by FIG.2A. The semiconductor layer 228 is formed, for example, by a metalorganic chemical vapor deposition (MOCVD) process, a molecular beamepitaxial (MBE) process, or other suitable epitaxial growth processes,to sequentially form the first type semiconductor material layer 222,the light emitting material layer 224, and the second type semiconductormaterial layer 226 on the substrate 210. The present embodimentillustrates an MOCVD process as an example, but the present invention isnot limited thereto. In the present embodiment, a material of thesubstrate 210 is an aluminum oxide with good transmittance, for example.Furthermore, in an embodiment of the invention, a material of the firsttype semiconductor material layer 222 is an N-type semiconductormaterial, the light emitting material layer 224 is a multiple quantumwell (MQW) light emitting layer, and a material of the second typesemiconductor material layer 226 is a P-type semiconductor material.However, in other embodiments, the materials for the first typesemiconductor material layer 222 and the second type semiconductormaterial layer 226 may also be a P-type semiconductor material and anN-type semiconductor material respectively.

Afterwards, the semiconductor layer 228 is patterned to form asemiconductor device layer 220, as illustrated in FIG. 2B. In thepresent embodiment, the semiconductor device layer 220 is formed, forexample, by a conventional photolithography and etching process (PEP).For example, after the semiconductor layer 228 is formed on thesubstrate 210, the second type semiconductor material layer 226, thelight emitting material layer 224 and the first type semiconductormaterial layer 222 are patterned by the PEP to form a first typesemiconductor device layer 222 a, a light emitting device layer 224 aand a second type semiconductor device layer 226 a, as shown in FIG. 2B.The light emitting device layer 224 a is disposed on a portion of thefirst type semiconductor device layer 222 a, and the second typesemiconductor device layer 226 a is disposed on the light emitting layer224 a.

Afterwards, a current spreading layer 230 is formed on a portion of thesemiconductor device layer 220, as illustrated by FIG. 2C. In thepresent embodiment, the current spreading layer 230 is formed, forexample, by the conventional PEP. In an embodiment of the presentinvention, upon completion of the foregoing steps, a conductive layer(not shown) is formed entirely on the second type semiconductor devicelayer 226 a. Then, the conductive layer is patterned to form the currentspreading layer 230. The current spreading layer 230 has an opening 232to expose an upper surface 220 a of the second type semiconductor layer226 a, as illustrated by FIG. 2C. In the present embodiment, the opening232 may be a circular opening, an annular opening or an opening in othershapes. Moreover, a material of the current spreading layer 230 is, forexample, indium tin oxide (ITO), indium zinc oxide (IZO), indium tinzinc oxide (ITZO), hafnium oxide, zinc oxide, aluminum oxide, aluminumtin oxide, aluminum zinc oxide, cadmium tin oxide, cadmium zinc oxide,or other suitable transparent conductive materials. In the presentembodiment, the current spreading layer 230 is fabricated by ITO.

Then, a current blocking layer 240 and a passivation layer 250 areformed on a portion of the semiconductor device layer 220 that is notcovered by the current spreading layer 230, as illustrated by FIG. 2D.In the present embodiment, the current blocking layer 240 and thepassivation layer 250 are formed, for example, by forming a dielectriclayer (not shown) entirely on a portion of the semiconductor devicelayer 220 that is not covered by the current spreading layer 230.Afterwards, the dielectric layer is patterned by the conventional PEP,so as to form the current blocking layer 240 and the passivation layer250 simultaneously. Hence, the current blocking layer 240 contacts withthe upper surface 220 a of the second type semiconductor layer 226 athrough the opening 232. Moreover, a contact area of the currentblocking layer 240 and the second type semiconductor layer 226 asubstantially equals to a bottom area A1 of the opening 232, as shown inFIG. 2D.

In addition, the dielectric layer is formed, for example, by a plasmaenhanced chemical vapor deposition (PECVD) process, but the presentembodiment is not limited thereto. Other suitable processes may also beused, such as a screen printing process, a coating process, or an inkjetprinting process (IJP process). In the present embodiment, thedielectric layer may be a single-layered or a multi-layered structure,and a material of the dielectric layer is, for example, a siliconcarbide based material. The silicon carbide based material isSiO_(x)C_(y): H, SiC, SiC_(x)N_(y), or SiO_(x)C_(y)N_(z), for example.In an embodiment of the present invention, the dielectric layer of thesilicon carbide based material will not be easily eroded by a bufferedoxide etch (BOE) process with the use of hydrofluoric acid (HF), etc.Thus, the fabricating process will have a better reliability.

In other embodiments, a material of the dielectric layer can also be anorganic or an inorganic material listed below. An organic material is,for example, silicon oxide, silicon nitride, silicon oxynitride, siliconcarbide, hafnium oxide, aluminum oxide, or other suitable materials. Aninorganic material is, for example, photoresist, benzocyclobutene,cycloalkene, polyimide, polyamide, polyester, polyalcohol, polyethyleneoxide, polyphenylene, resin, polyether, polyketone or other suitablematerials. The embodiment described above is merely exemplary, and thepresent invention is not limited thereto.

Next, a first electrode 262 is formed on the current blocking layer 240and the current spreading layer 230, and a second electrode 264 isformed on the semiconductor device layer 220, as illustrated by FIG. 2E.In the present embodiment, the first electrode 262 and the secondelectrode 264 are formed, for example, by the conventional PEP. In anembodiment of the present invention, a patterned photoresist layer (notshown) is formed on the current blocking layer 240, the currentspreading layer 230, and the semiconductor device layer 220. Afterwards,an electrode material layer (not shown) is formed entirely on thesubstrate 210. Then, the patterned photoresist layer is removed, suchthat the electrode material layer on the patterned photoresist layer isalso removed (i.e. lift-off process) to faun the first electrode 262 andthe second electrode 264 as shown in FIG. 2E.

In detail, when the light emitting diode chip 200 is emitting the light,the current blocking layer 240 and the current spreading layer 230 candistribute the current evenly, so that the light emitting layer 224 aemits a more even light. Furthermore, the protection layer 250 issuitable for preventing the semiconductor device layer 220 from beingdamaged or oxidized by influences of the exterior environment and thenenhancing electrical characteristics of the light emitting diode chip200 when driven.

In the present embodiment, the current blocking layer 240 and thepassivation layer 250 of the light emitting diode chip 200 arefabricated simultaneously by conventional PEP, such that the fabricatingsteps can be reduced to minimize the fabrication cost and thefabrication time of the light emitting diode chip 200 effectively.Moreover, as the silicon carbide based material is applied in thecurrent blocking layer 240, the current blocking layer 240 will not beeasily eroded by the BOE process with the use of HF, etc. Thus, thereliability of the fabricating process is increased.

FIGS. 3A to 3B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention. Firstly, a light emittingdiode chip 200 a formed by the fabricating steps as shown by FIGS. 2A to2C is provided and the relevant description thereof is not reiteratedherein.

Then, a current blocking layer 240′ and the passivation layer 250 areformed on a portion of the semiconductor device layer 220 that is notcovered by the current spreading layer 230, as illustrated by FIG. 3A.In the present embodiment, the current blocking layer 240′ and thepassivation layer 250 are formed, for example, by the method for formingthe current blocking layer 240 and the passivation layer 250 mentionedabove. The only difference between the two methods is that a contactarea of the current blocking layer 240′ is substantially smaller thanthe bottom area A1 of the opening 232. In other words, the currentblocking layer 240′ is formed by merely modifying mask patterns ratherthan providing additional exposure development processes. Here, arelevant fabricating method thereof can be referred to the foregoing,and is not repeated herein.

Similarly, upon completion of the foregoing steps, a first electrode262′ is formed on the current blocking layer 240′, the current spreadinglayer 230, and a portion of the second type semiconductor device layer226 a. Furthermore, the second electrode 264 is formed on thesemiconductor device layer 220, as illustrated by FIG. 3B. In thepresent embodiment, the first electrode 262′ and the second electrode264 are formed, for example, by the method of fabricating the firstelectrode 262 and the second electrode 264, and the method is thus notreiterated herein. It should be noted that since the current blockinglayer 240′ is different from the current blocking layer 240, the firstelectrode 262′ is directly connected to a portion of the second typesemiconductor device layer 226 a that is exposed by the opening 232 butnot covered by the current blocking layer 240, as shown in FIG. 3B.

In the present embodiment, the fabricating steps of the light emittingdiode chip 200 a are substantially the same as those of the lightemitting diode chip 200, and the difference is the designs of the maskpatterns of the current blocking layer 240′ and the mask patterns of thecurrent blocking layer 240. In other words, the fabricating method ofthe light emitting diode chip 200 a also reduces the fabrication steps,cost, and time.

The Second Embodiment

FIGS. 4A through 4F schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a secondembodiment of the present invention. Firstly, a first type semiconductormaterial layer 322, a light emitting material layer 324, and a secondtype semiconductor material layer 326 are sequentially formed on asubstrate 310 to form a semiconductor layer 328, as illustrated by FIG.4A. In the present embodiment, the steps of fabricating thesemiconductor layer 328 on the substrate 310 are the same as those offabricating the semiconductor layer 228 on the substrate 210 (shown inthe first embodiment), for example. Thus, a relevant description can bereferred to the foregoing embodiment, and is not reiterated herein.Moreover, a material of the substrate 310 is, for example, a materialdescribed for the substrate 210. The material layers 322, 324, and 326are the same as the material layers 222, 224, and 226 of the previousembodiment. Thus, a relevant description is omitted herein.

Afterwards, the semiconductor layer 328 is patterned to form asemiconductor device layer 320, as illustrated in FIG. 4B. In thepresent embodiment, the semiconductor device layer 320 is formed, forexample, by a conventional photolithography and etching process (PEP).Upon the completion of the foregoing process of fabricating thesemiconductor layer 328, the second type semiconductor material layer326, the light emitting material layer 324, and the first typesemiconductor material layer 322 are patterned by the PEP to form afirst type semiconductor device layer 322 a, a light emitting devicelayer 324 a, and a second type semiconductor device layer 326 a, asillustrated in FIG. 4B. The light emitting device layer 324 a isdisposed on a portion of the first type semiconductor device layer 322a, and the second type semiconductor device layer 326 a is disposed onthe light emitting device layer 324 a.

Then, a current blocking layer 340 and a passivation layer 350 areformed simultaneously on a portion of the semiconductor device layer320, as shown in FIG. 4C. In the present embodiment, the currentblocking layer 340 and the passivation layer 350 are formed, forexample, by forming a dielectric layer (not shown) entirely on thesemiconductor device layer 320. Afterwards, the dielectric layer ispatterned by the conventional PEP, so as to form the current blockinglayer 340 and the passivation layer 350 simultaneously as shown in FIG.4C.

In addition, the dielectric layer is formed, for example, by a plasmaenhanced chemical vapor deposition (PECVD) process, but the presentembodiment is not limited thereto. Other suitable processes may also beused, such as a screen printing process, a coating process, or an inkjetprinting process. Similarly, in the present embodiment, the dielectriclayer may be a single-layered or a multi-layered structure, and amaterial of the dielectric layer is, for example, the material used forfabricating the current blocking layer 240 and the passivation layer250. Hence, a relevant illustration can be referred to the foregoingembodiment, and is not reiterated herein.

Afterwards, the current blocking layer 340 and the passivation layer 350are used as a mask to remove a portion of the semiconductor device layer320 not covered by the current blocking layer 340 and the passivationlayer 350, so as to form a plurality of identification recesses 320 b onthe semiconductor device layer 320, as illustrated in FIG. 4D. In thepresent embodiment, the identification recesses are formed, for example,by an etching process. The etching process thereof is dry-etching orother suitable etching processes, for example. Moreover, theidentification recesses 320 b formed by the etching process have a depthD1 that principally does not affect normal operation of thesemiconductor device. In general, the depth D1 of the identificationrecesses 320 b is usually smaller than a thickness of the second typesemiconductor layer 326 a.

Next, a current spreading layer 330 is formed on the current blockinglayer 340 and a portion of the semiconductor device layer 320, as shownin FIG. 4E. In the present embodiment, the current spreading layer 330is formed, for example, by the conventional PEP. In an embodiment of thepresent invention, upon completion of the foregoing steps, a conductivelayer (not shown) is formed entirely on the second type semiconductordevice layer 326 a. Then, the conductive layer is patterned to form thecurrent spreading layer 330 as illustrated in FIG. 4E. In the presentembodiment, the identification recesses 320 b are formed on thesemiconductor device layer 320. Since the second type semiconductordevice layer 326 a and the current blocking layer 340 are films ofdifferent materials, the identification recesses 320 b and surroundingfilms that are not recessed will have a color contrast, whichfacilitates an alignment of different PEPs. Herein, the current blockinglayer 340 is usually a transparent material and the second typesemiconductor layer 325 a is a semiconductor material. Moreover, amaterial of the current spreading layer 330 of the present embodiment isexemplified by an indium tin oxide. In other embodiments, the materialof the current spreading layer 330 may also be materials mentioned inthe current spreading layer 230. Therefore, a relevant illustration canbe referred to the foregoing embodiments, and is not repeated here.

Next, a first electrode 362 is formed on the current spreading layer 330and a second electrode 364 is formed on the semiconductor device layer320, as illustrated by FIG. 4F. In the present embodiment, the firstelectrode 362 and the second electrode 364 are formed, for example, bythe conventional PEP. In an embodiment of the present invention, apatterned photoresist layer (not shown) can be first formed on thecurrent spreading layer 330, the passivation layer 350, and thesemiconductor device layer 320. Afterwards, an electrode material layer(not shown) is formed entirely on the substrate 310. Then, the patternedphotoresist layer is removed, such that the electrode material layer onthe patterned photoresist layer is also removed to form the firstelectrode 362 and the second electrode 364 as shown in FIG. 4F. Up tothis point, the process of fabricating a light emitting diode chip 300is generally completed.

In the present embodiment, the steps of fabricating the light emittingdiode chip 300 mainly use the PEP to fabricate the current blockinglayer 340 and the passivation layer 350 simultaneously, such that thefabricating steps can be reduced to minimize the fabrication cost andthe fabrication time of the light emitting diode chip 300 effectively.Moreover, as the identification recesses 320 b are formed on thesemiconductor device layer 320, an easier alignment process may beperformed when forming the current spreading layer 330. Moreover, as thesilicon carbide based material is applied in the current blocking layer340, the current blocking layer 340 will not be easily eroded by a BOEprocess with the use of HF, etc. Thus, the fabricating process has abetter reliability.

FIGS. 5A to 5B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention. Firstly, a light emittingdiode chip 300 a is formed by first applying the fabricating steps asshown by FIGS. 4A to 4D. Thus, a relevant description thereof is notreiterated herein.

Upon completion of the foregoing steps, a current spreading layer 330′is formed on the current blocking layer 340 and a portion of thesemiconductor device layer 320, as shown in FIG. 5A. In the presentembodiment, the current spreading layer 330′ is formed, for example, byusing the method of forming the current spreading layer 330. Therefore,a relevant process can be referred to the foregoing and is omitted here.The only difference between the two methods is that the currentspreading layer 330′ is formed by adjusting mask patterns, such that thecurrent spreading layer 330′has an opening 332, which then exposes anupper surface 340 a of the current blocking layer 340. Herein, a shapeof the opening 332 can be a circular opening, an annular opening, oropenings in other shapes. In other words, the current spreading layer330′ is formed merely by adjusting the mask patterns rather thanproviding additional exposure development processes.

Similarly, after the foregoing steps have been completed, a firstelectrode 362′ is formed on the current spreading layer 330′, and thesecond electrode 364 is formed on the semiconductor device layer 320, asillustrated by FIG. 5B. In the present embodiment, the first electrode362′ and the second electrode 364 are formed, for example, by the methodof fabricating the first electrode 362 and the second electrode 364,thus the method is not reiterated herein. It should be noted that sincethe current spreading layer 330′ has the opening 332, when the firstelectrode 362′ is formed on the current spreading layer 330, the firstelectrode 362′ will contact with the upper surface 340 a of the currentblocking layer 340 through the opening 332 as illustrated in FIG. 5B. Upto this point, the process of fabricating the light emitting diode chip300 a is generally completed.

In the present embodiment, the fabricating steps of the light emittingdiode chip 300 a are the same as those of the light emitting diode chip300, and the only slight difference exists in the designs of the maskpatterns of the current spreading layer 330′ and the mask patterns ofthe current spreading layer 330. In other words, the fabricating stepsof the light emitting diode chip 300 a have the same advantages as thosedescribed in the fabricating of light emitting diode chip 300.

The Third Embodiment

FIGS. 6A through 6E schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a thirdembodiment of the present invention. Firstly, a first type semiconductormaterial layer 422, a light emitting material layer 424, and a secondtype semiconductor material layer 426 are sequentially formed on asubstrate 410 to form a semiconductor layer 428, as illustrated by FIG.6A. The steps of fabricating the semiconductor layer 428 on thesubstrate 410 are the same as those of fabricating the semiconductorlayer 228 on the substrate 210, for example. Hence, a relevantdescription can be referred to the foregoing embodiments, and is notreiterated herein. Moreover, a material of the substrate 410 is, forexample, a material described for the substrate 210. The material layers422, 424, and 426 are the same as the material layers 222, 224, and 226of the foregoing embodiments. Thus, a relevant description is notrepeated herein.

Afterwards, the semiconductor layer 428 is patterned to form asemiconductor device layer 420, as illustrated in FIG. 6B. In thepresent embodiment, the semiconductor device layer 420 is formed, forexample, by a conventional photolithography and etching process (PEP).Upon the completion of the foregoing process of fabricating thesemiconductor layer 428, the second type semiconductor material layer426, the light emitting material layer 424, and the first typesemiconductor material layer 422 are patterned by the PEP to form afirst type semiconductor device layer 422 a, a light emitting devicelayer 424 a, and a second type semiconductor device layer 426 a, asillustrated in FIG. 6B. The light emitting device layer 424 a isdisposed on a portion of the first type semiconductor device layer 422a, and the second type semiconductor device layer 426 a is disposed onthe light emitting device layer 424 a. Up to this point, the steps offabricating the semiconductor device layer 420 are generally completed.

Thereafter, a patterned functional layer with multi-layer structure 470is formed simultaneously on a portion of the semiconductor device layer420 as illustrated in FIG. 6C. In the present embodiment, the patternedfunctional layer 470 is formed, for example, by forming a firstdielectric layer 482 entirely on the semiconductor device layer 420.Then, an alignment identification layer 484 is formed entirely on thefirst dielectric layer 482. Finally, the first dielectric layer 482 andthe alignment identification layer 484 are patterned by the PEP to forma current blocking layer 440 and a passivation layer 450 simultaneouslyas shown in FIG. 6C. In other words, the patterned functional layer 470of the present embodiment mainly uses the PEP to form the currentblocking layer 440 and the passivation layer 450 simultaneously andfurther reduce the fabricating steps.

In addition, the alignment identification layer 484 is, for example, themetal of at least one of gold, silver, copper, tin, lead, hafnium,tungsten, molybdenum, neodymium, titanium, tantalum, aluminum, zinc,etc. Furthermore, the first dielectric layer 482 is, for example, atransparent dielectric material of a silicon carbide based material,etc. Herein, the silicon carbide based material is SiO_(x)C_(y): H, SiC,SiC_(x)N_(y), or SiO_(x)C_(y)N_(z), for example. Hence, the currentblocking layer 440 and the passivation layer 450 formed by the films 482and 484 can be identified by a color of the alignment identificationlayer 484 to further increase the convenience and accuracy of alignmentin the following process. In other embodiments, the first dielectriclayer 482 can also be a material used to form the current blocking layer240 and the passivation layer 250. As a result, a relevant descriptioncan be referred to the foregoing embodiments and is omitted here.

Upon completion of the steps aforementioned, a current spreading layer430 is formed on a portion of the patterned functional layer 470 and aportion of the semiconductor device layer 420. Next, a portion of thepatterned functional layer 470 not covered by the current spreadinglayer 430 is removed, as illustrated in FIG. 6D. In the presentembodiment, the current spreading layer 430 is foamed, for example, bythe conventional PEP. In an embodiment of the present invention, aconductive layer (not shown) is formed entirely on the second typesemiconductor device layer 426 a and the current blocking layer 440.Herein, the current blocking layer 440 is, for example, a portion of thepatterned functional layer 470 aforementioned. Afterwards, theconductive layer is patterned by the PEP to form the current spreadinglayer 430, as shown by FIG. 6D. On the other hand, to prevent a shortcircuit from occurring between the alignment identification layer 484 onthe passivation layer 450 and a subsequently formed electrode structure,the etching process is performed to remove the alignment identificationlayer 484 on the passivation layer 450, as shown in FIG. 6D.Additionally, a material of the current spreading layer 430 of thepresent embodiment is exemplified by an indium tin oxide. In otherembodiments, the material of the current spreading layer 430 may also bematerials mentioned in the current spreading layer 230. Thus, a relevantillustration can be referred to the foregoing embodiments and is notreiterated herein.

Next, as shown in FIG. 6E, a first electrode 462 is formed on thecurrent spreading layer 430 and a second electrode 464 is formed on thesemiconductor device layer 420. In the present embodiment, the firstelectrode 462 and the second electrode 464 are formed, for example, bythe conventional PEP. In an embodiment of the present invention, apatterned photoresist layer (not shown) can be first formed on thecurrent spreading layer 430 and the semiconductor device layer 420.Afterwards, an electrode material layer (not shown) is formed entirelyon the substrate 410. Then, the patterned photoresist layer is removed,such that the electrode material layer on the patterned photoresistlayer is also removed to form the first electrode 462 and the secondelectrode 464 as shown in FIG. 6E. Up to this point, the process offabricating a light emitting diode chip 400 is generally completed.

In light of the foregoing, the steps of fabricating the light emittingdiode chip 400 mainly form the first dielectric layer 482 and thealignment identification layer 484 entirely, and then fabricate thecurrent blocking layer 440 and the passivation layer 450 simultaneouslyby the PEP. Hence, the method of fabricating the light emitting diodechip 400 not only reduces the fabrication steps, cost, and time, butalso allows the current blocking layer 440 and the passivation layer 450to have a better identity. As a consequence, the fabricating method canbe used as an identification tool for the alignment to increase thealignment accuracy in the following fabricating steps. Similarly, whenthe silicon carbide based material is applied in the current blockinglayer 440, the current blocking layer 440 will not be easily eroded by aBOE process with the use of HF, etc. Thus, the fabricating process has abetter reliability.

FIGS. 7A to 7C schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention. Firstly, a light emittingdiode chip 400 a is formed by first applying the fabricating steps asshown by FIGS. 6A to 6B. Consequently, a relevant description thereof isomitted here.

Next, a patterned functional layer 470′ with multi-layer structure isformed simultaneously on a portion of the semiconductor device layer 420as illustrated in FIG. 7A. In the present embodiment, the patternedfunctional layer 470′ is formed, for example, by the method of formingthe patterned functional layer 470. Therefore, a relevant descriptioncan be referred to the foregoing. The only difference between the twomethods is that designs of mask patterns of a current blocking layer440′ are different from that of the current blocking layer 440.Therefore, after the first dielectric layer 482 and the alignmentidentification layer 484 are patterned by the PEP, the current blockinglayer 440′ will have an opening 432 to expose an upper surface 420 a ofthe second type semiconductor layer 426 a, as shown in FIG. 7A. In thepresent embodiment, the patterned functional layer 470′ also has thesame advantages as that of the patterned functional layer 470 does, anda relevant description thereof is thus omitted.

Then, a current spreading layer 430′ is formed on a portion of thepatterned functional layer 470′ and a portion of the semiconductordevice layer 420′. Next, a portion of the patterned functional layer470′ not covered by the current spreading layer 430′ is removed, asillustrated in FIG. 7B. In the present embodiment, the current spreadinglayer 430′ is formed, for example, by using the method of forming thecurrent spreading layer 430. Therefore, a relevant illustration can bereferred to the foregoing and is not reiterated herein. Similarly, toprevent short circuit from occurring between the alignmentidentification layer 484 on the passivation layer 450 and the electrodestructure subsequently formed, the etching process is performed toremove the alignment identification layer 484 on the passivation layer450, as shown in FIG. 7B. It should be noted that as the currentblocking layer 440′ has the opening 432, when the current spreadinglayer 430′ is formed on a portion of the patterned functional layer 470and a portion of the semiconductor device layer 420, the currentspreading layer 430′will contact with the upper surface 420 a of thesecond type semiconductor layer 426 a through the opening 432, as shownin FIG. 7B.

Similarly, after the foregoing steps have been completed, the firstelectrode 462 is formed on the current spreading layer 430′ and thesecond electrode 464 is formed on the semiconductor device layer 420, asillustrated by FIG. 7C. In the present embodiment, the first electrode462 and the second electrode 464 are formed, for example, by thefabricating method mentioned above, thus the method is not reiteratedherein. Up to this point, the process of fabricating the light emittingdiode chip 400 a is generally completed.

In the present embodiment, the fabricating method of the light emittingdiode chip 400 a is similar to that of the light emitting diode chip400. The only difference between the two methods is that the currentblocking layer 440′ uses different mask pattern designs than those ofthe current blocking layer 440, such that the current blocking layer440′ has the opening 432. Consequently, the current spreading layer 430′will contact with the upper surface 420 a of the second typesemiconductor layer 426 a through the opening 432. In other words, themethod of fabricating the light emitting diode chip 400 a also has thesame advantages as that of the light emitting diode chip 400 does, and arelevant description thereof is thus omitted.

FIGS. 8A to 8B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention. Firstly, a light emittingdiode chip 400 b is formed by first applying the fabricating steps asshown by FIGS. 6A to 6B and FIG. 7A. Thus, a relevant descriptionthereof is not repeated herein.

Then, a current spreading layer 430″ is formed on a portion of thesemiconductor device layer 420, and a portion of the patternedfunctional layer 470′ not covered by the current spreading layer 430″ isremoved, as illustrated in FIG. 8A. In the present embodiment, thecurrent spreading layer 430″ is formed, for example, by using the methodof forming the current spreading layer 430′. Moreover, a relevantillustration can be referred to the foregoing and is omitted herein.Here, the only difference between the current spreading layer 430″ andthe current spreading layer 430′ is that mask patterns of differentshapes are used. Furthermore, to prevent the short circuit fromoccurring between the alignment identification layer 484 and thesubsequently formed electrode structure, the etching process isperformed to remove the alignment identification layer 484, as shown inFIG. 8A. In the present embodiment, the first dielectric layer 482 (orthe aforementioned current blocking layer 440′) has the opening 432. Asa result, when the current spreading layer 430″ is formed on a portionof the semiconductor device layer 420, the current spreading layer 430″contacts with the upper surface 420 a of the second type semiconductorlayer 426 a through the opening 432, as shown in FIG. 8A.

Upon completion of the foregoing steps, the first electrode 462 isformed on the current spreading layer 430″ and a portion of thepatterned functional layer 470′, and the second electrode 464 is formedon the semiconductor device layer 420, as illustrated by FIG. 8B. In thepresent embodiment, the first electrode 462 and the second electrode 464are formed, for example, by the fabricating method mentioned above, thusthe method is not reiterated herein. Up to this step, the process offabricating the light emitting diode chip 400 b is generally completed.

Similarly, in the present embodiment, the method of fabricating thelight emitting diode chip 400 b is similar to that of the light emittingdiode chip 400 a. The only difference between the two methods is thatthe current spreading layer 430″ and the current spreading layer 430′have different mask pattern designs. Hence, upon completion of thefollowing electrode fabrication, the structure of the light emittingdiode chip 400 b will be different from that of the light emitting diodechip 400 a. However, the light emitting diode chip 400 b is formed bythe fabricating steps of the light emitting diode chip 400 a, except forthe different designs of the mask patterns in some steps. As a result,the light emitting diode chip 400 b also has the same advantages as thatof the light emitting diode chips 400 a and 400 do, and a relevantdescription thereof is thus omitted.

The Fourth Embodiment

FIGS. 9A through 9E schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to a fourthembodiment of the present invention. Firstly, a first type semiconductormaterial layer 522, a light emitting material layer 524, and a secondtype semiconductor material layer 526 are sequentially formed on asubstrate 510 to form a semiconductor layer 528, as illustrated by FIG.9A. The steps of fabricating the semiconductor layer 528 on thesubstrate 510 are the same as those of fabricating the semiconductorlayer 228 on the substrate 210, for example. Thus, a relevantdescription can be referred to the foregoing embodiments, and is notreiterated herein. Moreover, a material of the substrate 510 is, forexample, a material described for the substrate 210. The material layers522, 524, and 526 are the same as the material layers 222, 224, and 226of the foregoing embodiments. Thus, a relevant description is notrepeated herein.

Afterwards, the semiconductor layer 528 is patterned to form asemiconductor device layer 520, as illustrated in FIG. 9B. In thepresent embodiment, the semiconductor device layer 520 is formed, forexample, by a conventional photolithography and etching process (PEP).Upon the completion of the foregoing process of fabricating thesemiconductor layer 528, the second type semiconductor material layer526, the light emitting material layer 524, and the first typesemiconductor material layer 522 are patterned by the PEP to form afirst type semiconductor device layer 522 a, a light emitting devicelayer 524 a, and a second type semiconductor layer device 526 a, asillustrated in FIG. 9B. The light emitting layer 524 a is disposed on aportion of the first type semiconductor device layer 522 a, and thesecond type semiconductor layer 526 a is disposed on the light emittinglayer device 524 a. Up to this point, the steps of fabricating thesemiconductor device layer 520 are generally completed.

Next, a patterned functional layer 570 with multi-layer structure isformed simultaneously on a portion of the semiconductor device layer 520as illustrate in FIG. 9C. In the present embodiment, the patternedfunctional layer 570 is formed, for example, by forming a firstdielectric layer 582 entirely on the semiconductor device layer 520.Then, an alignment identification layer 584 is formed entirely on thefirst dielectric layer 582. Finally, the first dielectric layer 582 andthe alignment identification layer 584 are patterned by the PEP to forma current blocking layer 540, a passivation layer 550, and an isolatingtrench 552 disposed within the passivation layer 550 simultaneously, asshown in FIG. 9C. In detail, the patterned functional layer 570 of thepresent embodiment mainly uses the PEP to form the current blockinglayer 540 and the passivation layer 550 simultaneously to reduce thefabricating steps. Besides, the patterned functional layer 570 has theisolating trench 552 as shown in FIG. 9C. Thus, when fabricating afollowing electrode structure, a short circuit can be prevented fromoccurring between electrodes.

In the present embodiment, a material of the alignment identificationlayer 584 is, for example, the material described for the alignmentidentification layer 484 in the previous embodiment. In addition, amaterial of the first dielectric layer 582 is, for example, the materialmentioned for the first electrode layer 482 in the previous embodiment.Thus, a relevant illustration can be referred to the foregoing and isnot repeated herein. Hence, the current blocking layer 540 and thepassivation layer 550 formed by the films 582 and 584 can be identifiedby a color of the alignment identification layer 584 so that analignment in the following fabricating process may be performedconveniently.

Upon completion of the steps aforementioned, a current spreading layer530 is formed on a portion of the patterned functional layer 570 and aportion of the semiconductor device layer 520 as illustrated by FIG. 9D.In the present embodiment, the current spreading layer 530 is formed,for example, by the conventional PEP. In an embodiment of the presentinvention, a conductive layer (not shown) is formed entirely on thesecond type semiconductor layer 526 a and the current blocking layer540. Herein, the current blocking layer 540 is, for example, a portionof the patterned functional layer 570 aforementioned. Afterwards, theconductive layer is patterned by the PEP to form the current spreadinglayer 530 as shown by FIG. 9D. Additionally, the material of the currentspreading layer 530 of the present embodiment is exemplified by anindium tin oxide. In other embodiments, the material of the currentspreading layer 530 may also be materials mentioned in the currentspreading layer 230. Therefore, a relevant illustration can be referredto the foregoing embodiments and is omitted here.

Next, a first electrode 562 is formed on the current spreading layer 530and a second electrode 564 is formed on the semiconductor device layer520. In the present embodiment, the first electrode 562 and the secondelectrode 564 are formed, for example, by the conventional PEP. In anembodiment of the present invention, a patterned photoresist layer (notshown) can be first formed on the current spreading layer 530 and thesemiconductor device layer 520. Afterwards, an electrode material layer(not shown) is formed entirely on the substrate 510. Then, the patternedphotoresist layer is removed, such that the electrode material layer onthe patterned photoresist layer is also removed to form the firstelectrode 562 and the second electrode 564 as shown in FIG. 9E. Itshould be noted that one or more isolating trench 552 is spaced betweenthe second electrode 564 and the first electrode 562 to prevent thefirst electrode 562 from being electrically connected to the secondelectrode 564 so as to result in the short circuit. Up to this point,the process of fabricating a light emitting diode chip 500 is generallycompleted.

In light of the foregoing, the steps of fabricating the light emittingdiode chip 500 mainly form the first dielectric layer 582 and thealignment identification layer 584 entirely, and then fabricate thecurrent blocking layer 540, the passivation layer 550, and the isolatingtrench 552 simultaneously by the PEP. Hence, the method of fabricatingthe light emitting diode chip 500 not only reduces the fabricationsteps, cost, and time, but also prevents the short circuit that resultsfrom the electrical connection between electrodes during the followingfabrication of an electrode structure. Besides, the current blockinglayer 540 and the passivation layer 550 are composed of the firstdielectric layer 582 and the alignment identification layer 584. Thus,the current blocking layer 540 and the passivation layer 550 can havebetter identity used as an identification tool for alignment to increasethe alignment accuracy in the following process. Similarly, as thesilicon carbide based material is applied in the current blocking layer540, the current blocking layer 540 will not be easily eroded by a BOEprocess with the use of HF, etc. Thus, the fabricating process has abetter reliability.

FIGS. 10A to 10C schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention. Firstly, a light emittingdiode chip 500 a is formed by first applying the fabricating steps asshown by FIGS. 9A to 9B, and a relevant description thereof is notreiterated herein.

Next, a patterned functional layer 570′ with multi-layer structure isformed simultaneously on a portion of the semiconductor device layer 520as illustrate in FIG. 10A. In the present embodiment, the patternedfunctional layer 570′ is formed, for example, by the method of formingthe patterned functional layer 570. Therefore, a relevant descriptioncan be referred to the foregoing. The only difference between the twomethods is that designs of mask patterns of a current blocking layer540′ are different from that of the current blocking layer 540.Therefore, after the first dielectric layer 582 and the alignmentidentification layer 584 are patterned by the PEP, the current blockinglayer 540′ will have an opening 532 to expose an upper surface 520 a ofthe second type semiconductor layer 526 a, as shown in FIG. 10A. In thepresent embodiment, the patterned functional layer 570′ also has thesame advantages as that of the patterned functional layer 570 does, anda relevant description thereof is thus omitted.

Thereafter, a current spreading layer 530′ is formed on a portion of thepatterned functional layer 570′ and a portion of the semiconductordevice layer 520 as illustrated by FIG. 10B. In the present embodiment,the current spreading layer 530′ is formed, for example, by using themethod of forming the current spreading layer 530. Here, a relevantillustration can be referred to the foregoing and is not repeated here.It should be noted that as the current blocking layer 540′ has theopening 532, the current spreading layer 530′ is formed on a portion ofthe patterned functional layer 570′ and a portion of the semiconductordevice layer 520. Hence, the current spreading layer 530′ will contactwith the upper surface 520 a of the second type semiconductor devicelayer 526 a through the opening 532, as shown in FIG. 10B.

Upon completion of the foregoing steps, the first electrode 562 isfoamed on the current spreading layer 530′ and a second electrode 564 isformed on the semiconductor device layer 520, as illustrated by FIG.10C. In the present embodiment, the first electrode 562 and the secondelectrode 564 are formed, for example, by the fabricating methodmentioned above, thus the method is not reiterated herein. Up to thispoint, the process of fabricating the light emitting diode chip 500 a isgenerally completed.

In the present embodiment, the fabricating method of the light emittingdiode chip 500 a is similar to that of the light emitting diode chip500. However, the only difference between the two methods is that thecurrent blocking layer 540′ uses different mask pattern designs thanthose of the current blocking layer 540, such that the current blockinglayer 540′ has the opening 532. Consequently, the current spreadinglayer 530′ will contact with the upper surface 520 a of the second typesemiconductor layer 526 a through the opening 532. In other words, themethod of fabricating the light emitting diode chip 500 a also has thesame advantages as that of the light emitting diode chip 500 does, and arelevant description thereof is thus omitted.

FIGS. 11A to 11B schematically illustrate cross-sectional views of afabricating process of a light emitting diode chip according to anothermode of embodiment of the present invention. Firstly, a light emittingdiode chip 500 b is formed by first applying the fabricating steps asshown by FIGS. 9A to 9B and FIG. 10A. Thus, a relevant descriptionthereof is not reiterated herein.

Afterwards, a current spreading layer 530″ is formed on a portion of thesemiconductor device layer 520, as illustrated by FIG. 11A. In thepresent embodiment, the current spreading layer 530″ is formed, forexample, by using the method of forming the current spreading layer530′. Moreover, a relevant illustration can be referred to the foregoingand is omitted herein. Here, the only difference between the currentspreading layer 530″ and the current spreading layer 530′ is that maskpatterns of different shapes are used.

In the present embodiment, as the current blocking layer 540′ has theopening 532, the current spreading layer 530″ is formed on a portion ofthe semiconductor device layer 520. Hence, the current spreading layer530″ will contact with the upper surface 520 a of the second typesemiconductor device layer 526 a through the opening 532, as shown inFIG. 11A.

After the completion of the foregoing steps, the first electrode 562 isformed on the current spreading layer 530′ and a portion of thepatterned functional layer 570′, and the second electrode 564 is formedon the semiconductor device layer 520, as illustrated by FIG. 11B. Inthe present embodiment, the first electrode 562 and the second electrode564 are formed, for example, by the fabricating method mentioned above,thus the method is not reiterated herein. Up to this step, the processof fabricating the light emitting diode chip 500 b is generallycompleted.

Similarly, in the present embodiment, the method of fabricating thelight emitting diode chip 500 b is similar to that of the light emittingdiode chip 500 a. The only difference between the two methods is thatthe current spreading layer 530″ and the current spreading layer 530′have different mask pattern designs. Hence, upon completion of thefollowing electrode fabrication, the structure of the light emittingdiode chip 500 b will be different from that of the light emitting diodechip 500 a. However, the light emitting diode chip 500 b is formed bythe fabricating steps of the light emitting diode chip 500 a, except forthe different designs of the mask patterns in some steps. As a result,the light emitting diode chip 500 b also has the same advantages as thatof the light emitting diode chips 500 a and 500 do, and a relevantdescription thereof is thus omitted.

The Fifth Embodiment

FIGS. 12A through 12E schematically illustrate cross-sectional views ofa fabricating process of a light emitting diode chip according to afifth embodiment of the present invention. Firstly, a first typesemiconductor material layer 622, a light emitting material layer 624,and a second type semiconductor material layer 626 are sequentiallyformed on a substrate 610 to form a semiconductor layer 628, asillustrated by FIG. 12A. The steps of fabricating the semiconductorlayer 628 on the substrate 610 are the same as those of fabricating thesemiconductor layer 228 on the substrate 210, for example. Thus, arelevant description can be referred to the foregoing embodiments, andis not reiterated herein. Moreover, a material of the substrate 610 is,for example, a material described for the substrate 610. The materiallayers 622, 624, and 626 are the same as the material layers 222, 224,and 226 of the foregoing embodiments. Thus, a relevant description isnot repeated herein.

Afterwards, the semiconductor layer 628 is patterned to form asemiconductor device layer 620, as illustrated in FIG. 12B. In thepresent embodiment, the semiconductor device layer 620 is formed, forexample, by a conventional PEP. Upon the completion of the foregoingprocess of fabricating the semiconductor layer 628, the second typesemiconductor material layer 626, the light emitting material layer 624,and the first type semiconductor material layer 622 are patterned by thePEP to form a first type semiconductor device layer 622 a, a lightemitting device layer 624 a, and a second type semiconductor layerdevice r 626 a, as illustrated in FIG. 12B. Herein, the light emittinglayer 624 a is disposed on a portion of the first type semiconductordevice layer 622 a, and the second type semiconductor device layer 626 ais disposed on the light emitting device layer 624 a. Up to this point,the steps of fabricating the semiconductor device layer 620 aregenerally completed.

Next, a patterned functional layer 670 with multi-layer structure isformed simultaneously on a portion of the semiconductor device layer 620as illustrate in FIG. 12C. In the present embodiment, the patternedfunctional layer 670 is formed, for example, by forming a firstdielectric layer 682 entirely on the semiconductor device layer 620.Then, an alignment identification layer 684 is formed entirely on thefirst dielectric layer 682. Next, a second dielectric layer 686 isformed on the alignment identification layer 684. Finally, the firstdielectric layer 682, the alignment identification layer 684, and thesecond dielectric layer 686 are patterned by the PEP to form a currentblocking layer 640 and a passivation layer 650 simultaneously as shownin FIG. 12C. In detail, the patterned functional layer 670 of thepresent embodiment mainly uses the PEP to form the current blockinglayer 640 and the passivation layer 650 simultaneously so as to reducethe fabricating steps. On the other hand, the patterned functional layer670 has a film structure of dielectric layer-metal layer-dielectriclayer, thus, the occurring of a short circuit between electrodes can beprevented when an electrode structure is subsequently fabricated.

In the present embodiment, a material of the alignment identificationlayer 684 is, for example, the material described for the alignmentidentification layer 484 in the previous embodiment. In addition, amaterial of at least one of the first dielectric layer 682 and thesecond dielectric layer 684 is, for example, the material mentioned forthe first dielectric layer 482 in the previous embodiment. Thus, arelevant illustration can be referred to the foregoing and is notomitted herein. Hence, the current blocking layer 640 and thepassivation layer 650 formed by the films 682, 684, and 686 can beidentified by a color of the alignment identification layer 684 so thatan alignment in the following fabricating process may be performedconveniently.

Upon completion of the steps aforementioned, a current spreading layer630 is formed on a portion of the patterned functional layer 670 and aportion of the semiconductor device layer 620 as illustrated by FIG.12D. In the present embodiment, the current spreading layer 630 isformed, for example, by the conventional PEP. In an embodiment of thepresent invention, a conductive layer (not shown) is formed entirely onthe second type semiconductor device layer 626 a and the currentblocking layer 640. Herein, the current blocking layer 640 is, forexample, a portion of the patterned functional layer 670 aforementioned.Afterwards, the conductive layer is patterned by the PEP to form thecurrent spreading layer 630 as shown by FIG. 12D. Additionally, thematerial of the current spreading layer 630 of the present embodiment isexemplified by an indium tin oxide. In other embodiments, the materialof the current spreading layer 630 may also be materials mentioned inthe current spreading layer 230. Therefore, a relevant illustration canbe referred to the foregoing embodiments and is not repeated herein.

Next, a first electrode 662 is formed on the current spreading layer 630and a second electrode 664 is formed on the semiconductor device layer620. In the present embodiment, the first electrode 662 and the secondelectrode 664 are formed, for example, by the conventional PEP. In anembodiment of the present invention, a patterned photoresist layer (notshown) can be first formed on the current spreading layer 630 and thesemiconductor device layer 620. Afterwards, an electrode material layer(not shown) is formed entirely on the substrate 610. Then, the patternedphotoresist layer is removed, such that the electrode material layer onthe patterned photoresist layer is also removed to form the firstelectrode 662 and the second electrode 664 as shown in FIG. 12E. Up tothis point, the process of fabricating a light emitting diode chip 600is generally completed.

In light of the foregoing, the steps of fabricating the light emittingdiode chip 600 mainly form the first dielectric layer 682, the alignmentidentification layer 684, and the second dielectric layer 686 entirely,and then fabricate the current blocking layer 640 and the passivationlayer 650 simultaneously by the PEP. Hence, the method of fabricatingthe light emitting diode chip 600 not only reduces the fabricationsteps, cost, and time, but also prevents the short circuit that resultsfrom the electrical connection between electrodes when the electrodestructure is subsequently formed. Besides, the current blocking layer640 and the passivation layer 650 are composed of the first dielectriclayer 682, the alignment identification layer 684, and the seconddielectric layer 686. Thus, the current blocking layer 640 and thepassivation layer 650 can have a better identity used as anidentification tool for alignment to increase the alignment accuracy inthe following process. Similarly, when the silicon carbide basedmaterial is applied in the current blocking layer 640, the currentblocking layer 640 will not be easily eroded by a BOE process with theuse of HF, etc. Thus, the fabricating process will have a betterreliability.

It should be noted that a concept of using the patterned functionallayer 670 with multi-layer structure in the method of fabricating thelight emitting diode chip 600 can also be applied in the methods offabricating the light emitting diode chips 400, 400 a, and 400 b. Inother words, in the methods of fabricating the light emitting diodechips 400, 400 a, and 400 b, the original patterned functional layers470 and 470′ can apply the concept of the patterned functional layer 670and further develop other possible embodiments. The combination andapplication of relevant fabricating steps can be referred to theforegoing embodiments, and thus are not reiterated herein.

In summary, the light emitting diode chip provided in the presentinvention has at least the following advantages. Firstly, the currentblocking layer and the current spreading layer are fabricatedsimultaneously with the PEP. Hence, the steps of fabricating the lightemitting diode chip can be reduced so as to save the fabrication costand the fabrication time. Moreover, the accuracy and convenience of thealignment in the following fabricating process are increased through thepatterned functional layer with multi-layer structure, or theidentification recesses. In addition, when a specific material, such asa silicon carbide based material, is utilized in the current blockinglayer, the current blocking layer will not be easily eroded by the BOEprocess with the use of HF, etc. Thus, the fabricating process will havea better reliability.

Though the present invention has been disclosed above by theembodiments, they are not intended to limit the present invention.Anybody skilled in the art can make some modifications and variationswithout departing from the spirit and scope of the present invention.Therefore, the protecting range of the present invention falls in theappended claims.

1. A method of fabricating a light emitting diode chip, comprising:forming a semiconductor device layer on a substrate; forming a currentblocking layer and a passivation layer on a portion of the semiconductordevice layer; removing a portion of the semiconductor device layer notcovered by the current blocking layer and the passivation layer to forma plurality of identification recesses on the semiconductor devicelayer; forming a current spreading layer on the current blocking layerand a portion of the semiconductor device layer; forming a firstelectrode on the current spreading layer; and forming a second electrodeon the semiconductor device layer.
 2. The method of fabricating thelight emitting diode chip as claimed in claim 1, wherein the method offorming the semiconductor device layer comprises: forming asemiconductor layer on the substrate; and patterning the semiconductorlayer to form the semiconductor device layer.
 3. The method offabricating the light emitting diode chip as claimed in claim 1, whereinthe method of forming the semiconductor device layer comprises: forminga first type semiconductor material layer, a light emitting materiallayer, and a second type semiconductor material layer sequentially onthe substrate; and patterning the second type semiconductor materiallayer, the light emitting material layer, and the first typesemiconductor material layer to form a first type semiconductor layer, alight emitting layer, and a second type semiconductor layer, wherein thelight emitting layer is disposed on a portion of the first typesemiconductor layer, and the second type semiconductor layer is disposedon the light emitting layer.
 4. The method of fabricating the lightemitting diode chip as claimed in claim 1, wherein the method of formingthe current blocking layer and the passivation layer comprises: forminga dielectric layer on the semiconductor device layer; and patterning thedielectric layer to form the current blocking layer and the passivationlayer simultaneously.
 5. The method of fabricating the light emittingdiode chip as claimed in claim 4, wherein a material of the dielectriclayer comprises a silicon carbide based material.
 6. The method offabricating the light emitting diode chip as claimed in claim 5, whereinthe silicon carbide based material comprises SiO_(x)C_(y): H, SiC,SiC_(x)N_(y), or SiO_(x)C_(y)N_(z).
 7. The method of fabricating thelight emitting diode chip as claimed in claim 4, wherein a material ofthe dielectric layer comprises silicon oxide, silicon nitride, orsilicon oxynitride.
 8. The method of fabricating the light emittingdiode chip as claimed in claim 1, wherein the method of forming theplurality of identification recesses comprises etching.
 9. The method offabricating the light emitting diode chip as claimed in claim 3, whereinthe method of forming the current spreading layer comprises: forming aconductive layer on the second type semiconductor layer and the currentblocking layer; and patterning the conductive layer to form the currentspreading layer.
 10. The method of fabricating the light emitting diodechip as claimed in claim 9, wherein the current spreading layer has anopening to expose an upper surface of the current blocking layer, andthe first electrode contacts with the upper surface of the currentblocking layer through the opening.